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Product Model Size (mm) Specification Quantity Inquiry
Coater/Developer CLEAN TRACK ACT™ 12 200 2 Block R->L 3 Ask TEL
Coater/Developer CLEAN TRACK ACT™ 12 300 1 Block L->R 17 Ask TEL
Coater/Developer CLEAN TRACK ACT™ 12 300 1 Block R->L 2 Ask TEL
Coater/Developer CLEAN TRACK ACT™ 12 300 2 Block L->R 3 Ask TEL
Coater/Developer CLEAN TRACK ACT™ 12 300 2 Block R->L 7 Ask TEL

Highest Sourced Tools
 
Coater/Developer
Thermal Processing Systems
Etch Systems
 
   
  ACT™ 8
ACT™ 12
Alpha 8SE UNITY™ Me
UNITY™ IIe
 


The following are either registered trademarks or trademarks of Tokyo Electron Limited in Japan and/or other countries.
CLEAN TRACK™, CLEAN TRACK ACT™, LITHIUS™, Telius™, UNITY™, Trias™, TELFORMULA™, TELINDY™, Precio™, Precio nano™, Precio octo™, WDF™