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Product Model Size (mm) Specification Quantity Inquiry
Etch Systems UNITY™ IIe 150 PE - 2 Chambers 2 Ask TEL
Etch Systems UNITY™ IIe 200 DRM - 2 Chambers 20 Ask TEL
Etch Systems UNITY™ IIe 200 IEM - 2 Chambers 12 Ask TEL
Etch Systems UNITY™ IIe 200 ATC, IEM - 3 Chambers 2 Ask TEL
Etch Systems UNITY™ IIe 200 PE - 2 Chambers 1 Ask TEL
Etch Systems UNITY™ IIe 200 SCCM - 2 Chambers 20 Ask TEL

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  ACT™ 8
ACT™ 12
Alpha 8SE UNITY™ Me
UNITY™ IIe
 


The following are either registered trademarks or trademarks of Tokyo Electron Limited in Japan and/or other countries.
CLEAN TRACK™, CLEAN TRACK ACT™, LITHIUS™, Telius™, UNITY™, Trias™, TELFORMULA™, TELINDY™, Precio™, Precio nano™, Precio octo™, WDF™